AFM探针描述
适用的Sample:
Other Hard Samples,Semiconductors
适用的AFM机型:
DimensionIcon,DimensionXR
适用的Work Mode:
tapping or non-contact
适用的Application:
Holes/ Trenches
Coating 描述
| cantilever Back side coating | Reflective Aluminum |
|---|---|
| tip coating | -- |
Tip 规格
| tip geometry | High Aspect Ratio |
|---|---|
| tip radius (Nom) | 10nm |
| tip height | 10-15um |
| Front Angle (FA) | 1.7±0.5° |
| Back Angle (BA) | 1.7±0.5° |
| Side Angle (SA) | 1.7±0.5° |
| Spike Height | 6500nm |
| Spike Width | 400nm |
Cantilever 规格
| cantilever geometry | Rectangular |
|---|---|
| K(Nom) | 42N/m |
| Frequency(Nom) | 320KHz |
| length(Nom) | 125um |
| thickness(Nom) | 4um |
| cantilever material | 0.01 - 0.025 Ωcm Antimony (n) doped Si |
| top layer back | 45±5 nm of Al |
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Frequency
Nom:
70KHz
Spring Const.
Nom:
2.9N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
Frequency
Nom:
300KHz
Spring Const.
Nom:
42N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
Frequency
Nom:
300KHz
Spring Const.
Nom:
42N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
