AFM探针描述
适用的Sample:
适用的AFM机型:
Insight
适用的Work Mode:
Critical Dimension (CD) AFM
适用的Application:
Holes/ Trenches
Coating 描述
| cantilever Front side coating | |
|---|---|
| cantilever Back side coating | Reflective Aluminum |
| tip coating | Carbon Coated |
Tip 规格
| tip geometry | Critical Dimension (Overhang) |
|---|---|
| tip radius (Nom) | -- |
| tip height | 14-16um |
| Front Angle (FA) | 15 ±5° |
| Back Angle (BA) | 15±5° |
| Side Angle (SA) | 15±5° |
| Overhang | 13-25nm |
| Effective Lenath | 700-900nm |
| Tip Width | 110-140nm |
| Vertical Edge Height | < 15nm |
Cantilever 规格
| cantilever geometry | Rectangular |
|---|---|
| K(Nom) | 35N/m |
| Frequency(Nom) | 350KHz |
| length(Nom) | 125um |
| thickness(Nom) | 4um |
| cantilever material | 0.010 - 0.025 Ωcm Silicon |
| top layer back | 40 ±10 nm of Al |
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Frequency
Nom:
70KHz
Spring Const.
Nom:
2.9N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
Frequency
Nom:
300KHz
Spring Const.
Nom:
42N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
Frequency
Nom:
300KHz
Spring Const.
Nom:
42N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
